POCl3 Auto Refill System
Přehled
HORIBA’s Award Winning Fluid Delivery System (FDM Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3 in 20 litre ETFE lined stainless steel canisters to multiple fixed plastic bubbler vessels.
The FDM and VM series are used for n-type diffusion layers as a dopant in manufacturing crystal silicon-based solar cell.
The system can also be used in the BBr3 diffusion process, improving process stability, increasing uptime, reducing logistics and labour costs and higher safety.
Funkce
- Higher productivity
The VM Series (Vapor Delivery Module) achieves higher productivity due to minimizing downtime as it does not require a traditional quartz bubbler exchange - Reduced running costs
The FDM Series reduces consumption of POCl3: up to 30% lower price per kg
More than 99.8% uptime due to continuous production
Decrease the cost of POCl3 waste
Longer tool lifetime and lower maintenance costs due to the process line never being exposed to the atmosphere
Delivered by 20L canister reduces logistics, storage and handling costs
Fewer POCl3 exchanges and bottle returns result in lower labor costs - Improved process stability
The VM Series keeps the liquid level ”High” resulting in the pick-up rate being more stable than a traditional quartz bubbler
There is no affect by liquid level due to the bubbler being continually refilled
No bubbler exchanges are needed resulting in no exchange mistakes
There is no affect from ambient temperature fluctuactions
Sheet resistance is more stable than traditional bubblers resulting in improved sheet resistance repeatability and reproducibility. - Improved safety
No more quartz. The VM Series is made from PFA vessel which is much more robust than quartz, no handling, exchanges or refilling of quartz bubblers are needed as it does not require periodical exchanges resulting in less opportunities for human error.
POCl3 is delivered in 20L ETFE lined stainless steel containers and contained in fixed and robust PFA vessel.
Robust, leak tight bubbler housing with N2 blanket and connected to facility exhaust
Integrated liquid leak and gas leak detection
Wetted lines fully purged and leak checked automatically. - Improved reliability
POCl3 is hydrophilic and produces phosphoric acid which can cause corrosion or crystallization. A normal bubbler requires periodical exchanges and when a bubbler is exchanged the possibility of contact with air increases. The HORIBA POCl3 Auto Refill System does not require exchanges of the bubbler resulting in a very low chance that POCl3 tubing makes contacts with the air.
Auto Refill System of POCl3 which is used for n-type diffusion layers as a dopant in manufacturing crystal silicon-based solar cell. achieves higher…
Secret Items
Secret Items are pets and hats that are not shown in their corresponding egg or box index. Each one is known for being extremely rare and being one of the best obtainable pets once released.
Secret items originally only consisted of pets until Update 21, when the first secret hat was added, along with a secret item index.
Secret items also originally only consisted of pets obtained from eggs until Update 48 where 3 pets that aren’t obtainable from eggs became secret, the Dementor, Dark Lord and Dark Radiance.
Some new secret pets later became available for purchase from the Traveling Merchant for a high cost in Gems .
List of Secret Pets
- Almighty Pumpkin
- Angelic Spirit
- Basilisks
- BGS Plaque
- Candycorn Shard
- Champions
- Crystal Teddy
- Dark Guardian
- Dark Lord
- Dark Radiance
- Dementor
- Dice Split
- Dragonfruit
- Dogcat
- Duality
- Easter Basket
- Elite Challenger
- Elite Fallen Angel
- Eternal Cucumber
- Eternal Heart
- Eternal Star
- Fallen Angel
- Frost Sentinel
- Galactic Paladin
- Ghost Spirits
- Giant Choco Chicken
- Giant Pearl
- Giant Robot
- Godly Gem
- Gryphon
- Holy Bell
- Immortal One
- Immortal Trophy
- King Doggy
- King Mush
- King Slime
- Koi
- Kraken
- Leviathan
- Lord Shock
- Lucid Leaf
- Luminance
- Magic Marshmallow
- Overlord Plushie
- Patriotic Robot
- Phantom
- Plasma Wolflord
- Pot O’ Gold
- Pyramidium
- Radiance
- Radiant One
- Rainbow Dogcat
- Rainbow Gryphon
- Robot 2.0
- Sea Star
- Shard
- Sinister Lord 2.0
- Sinister Lord
- Sinister Shard
- Skulls
- Soul Heart
- Spring Spirit
- Sundae Champions
- The Overlord
- The OwOlord
- Tophats
- Trophy
- Ultimate Clover
- Ultimate Trophy
- Wolflord
List of Secret Hats
- ObscureEntity
- Sylently’s Hat
- Vibe Check
- White Hat
- Dice Split
- BGS Plaque
- Ghost Spirits
- King Slime
- King Doggy
- The Overlord
- Lucid Leaf
- Sinister Lord 2.0
- #
- A
- B
- C
- D
- E
- F
- G
- H
- I
- J
- K
- L
- M
- N
- O
- P
- Q
- R
- S
- T
- U
- V
- W
- X
- Y
- Z
- Other
Secret Items Secret Items are pets and hats that are not shown in their corresponding egg or box index. Each one is known for being extremely rare and being one of the best obtainable pets once